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説明
Overlay Measurement System構成
構成なしOEMモデルの説明
The KLA-Tencor 5200XP is an automated overlay metrology tool for the semiconductor industry. It improves overlay control, maximizes lithography tool utilization, and meets the requirements of 0.18 µm design rules. It has the highest throughput in the industry and is compatible with current factory automation standards.ドキュメント
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KLA
5200XP
カテゴリ
Overlay
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
117905
ウェーハサイズ：
8"/200mm
ヴィンテージ：
不明
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説明
Overlay Measurement System構成
構成なしOEMモデルの説明
The KLA-Tencor 5200XP is an automated overlay metrology tool for the semiconductor industry. It improves overlay control, maximizes lithography tool utilization, and meets the requirements of 0.18 µm design rules. It has the highest throughput in the industry and is compatible with current factory automation standards.ドキュメント
ドキュメントなし