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説明
- Installed in Clean-room.構成
Tencor P-10 Step Height Measurement System - Standard Head with L(yellow) type stylus. - Measurement Range: 13㎛,300㎛. - Scan Length: 210mm. - Scan Speed : 1㎛ ~ 25 mm/sec. - Stylus Force: 1 ~100mg. - Motorized X-Y stage (max sample size:254x254mm). - Intel Pentium 233Mhz Ram:32MB , HDD: 2GB - Utility: Vacuum. - Power: 115V/50HZ, 4A.OEMモデルの説明
Tencor P-10 is an equipment used for research and development engineering that analyzes various substrates, including glass, ceramics, wafers, disks, and precision-machined surfaces. With an optional MicroHead II low-force measurement head, it can accurately measure soft surfaces like indium, gold, and photoresist.ドキュメント
ドキュメントなし
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KLA
P-10
カテゴリ
Profiler
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
65991
ウェーハサイズ：
8"/200mm
ヴィンテージ：
1995
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説明
- Installed in Clean-room.構成
Tencor P-10 Step Height Measurement System - Standard Head with L(yellow) type stylus. - Measurement Range: 13㎛,300㎛. - Scan Length: 210mm. - Scan Speed : 1㎛ ~ 25 mm/sec. - Stylus Force: 1 ~100mg. - Motorized X-Y stage (max sample size:254x254mm). - Intel Pentium 233Mhz Ram:32MB , HDD: 2GB - Utility: Vacuum. - Power: 115V/50HZ, 4A.OEMモデルの説明
Tencor P-10 is an equipment used for research and development engineering that analyzes various substrates, including glass, ceramics, wafers, disks, and precision-machined surfaces. With an optional MicroHead II low-force measurement head, it can accurately measure soft surfaces like indium, gold, and photoresist.ドキュメント
ドキュメントなし