説明
Description FUSION 150/3D Wafer Size Range Minimum 150 mm Maximum 200 mm Set Size 200 mm Power Requirements 380 V 14.0 A 50 Hz 3 Phase構成
構成なしOEMモデルの説明
The Fusion 200PCU PoLo is a product from Axcelis Technologies that offers a cost-effective single chamber solution for processing 125-200mm wafers. It features a rapid, one-step UV Bake™ Process that replaces the standard resist hardbake, allowing for higher process margins and increased consistency within dry etch and ion implantation sequences. This makes it a valuable tool for improving the efficiency and effectiveness of semiconductor manufacturing processes.ドキュメント
ドキュメントなし
カテゴリ
UV-Curing
最終検証： 今日
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
121204
ウェーハサイズ：
6"/150mm, 8"/200mm
ヴィンテージ：
1996
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
AXCELIS / FUSION
200 PCU
カテゴリ
UV-Curing
最終検証： 今日
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
121204
ウェーハサイズ：
6"/150mm, 8"/200mm
ヴィンテージ：
1996
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Description FUSION 150/3D Wafer Size Range Minimum 150 mm Maximum 200 mm Set Size 200 mm Power Requirements 380 V 14.0 A 50 Hz 3 Phase構成
構成なしOEMモデルの説明
The Fusion 200PCU PoLo is a product from Axcelis Technologies that offers a cost-effective single chamber solution for processing 125-200mm wafers. It features a rapid, one-step UV Bake™ Process that replaces the standard resist hardbake, allowing for higher process margins and increased consistency within dry etch and ion implantation sequences. This makes it a valuable tool for improving the efficiency and effectiveness of semiconductor manufacturing processes.ドキュメント
ドキュメントなし