説明
KLA-Tencor Candela CS10V *. Fully refurbished. Installed in Clean-room. Possible demo anytime.構成
Working Illumination Source : 25 mW laser, 405 nm wavelength Operator Interface : Trackball and keyboard standard Substrate Thickness : 350 μm ~ 1,100 μm Substrate Material : Any clear or opaque polished surface [ Performance ] Defect Sensitivity 0.08 μm diameter PSL sphere equivalent > 95% capture rate(PSL on bare Si) Other Defects and Applications : Particles, scratches, stains, pits, and bumps. Sensitivity: Minimum detectable size for automatic defect classification: - Scratches: 100 μm long, 0.1 μm wide, 50 Å; deep. - Pits: 20 μm diameter, 50 Å; deep - Stains: 20 μm diameter, 10 Å; thick [ Application ] - Opaque substrates - EPI Layers - Transparent film coatings (SiC, GaN, Sapphire)OEMモデルの説明
The Candela CS10 Optical Surface Analyzer is a compact device that offers exceptional sensitivity to particles and scratches on 2"-12" wafers using dual-laser Optical X-Beam technology. It simultaneously measures phase shift, scattered light, reflected light, and topography to detect and classify wafer surface defects. It is well-suited for laboratory and low volume production applications, and is easy to learn and operate.ドキュメント
ドキュメントなし
KLA
CANDELA CS10
検証済み
カテゴリ
Defect Inspection
主なアイテムの詳細
状態：
Refurbished
稼働ステータス:
不明
製品ID：
65978
ウェーハサイズ：
4"/100mm
ヴィンテージ：
2009
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
KLA
CANDELA CS10
検証済み
カテゴリ
Defect Inspection
最終検証： 30日以上前
主なアイテムの詳細
状態：
Refurbished
稼働ステータス:
不明
製品ID：
65978
ウェーハサイズ：
4"/100mm
ヴィンテージ：
2009
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
KLA-Tencor Candela CS10V *. Fully refurbished. Installed in Clean-room. Possible demo anytime.構成
Working Illumination Source : 25 mW laser, 405 nm wavelength Operator Interface : Trackball and keyboard standard Substrate Thickness : 350 μm ~ 1,100 μm Substrate Material : Any clear or opaque polished surface [ Performance ] Defect Sensitivity 0.08 μm diameter PSL sphere equivalent > 95% capture rate(PSL on bare Si) Other Defects and Applications : Particles, scratches, stains, pits, and bumps. Sensitivity: Minimum detectable size for automatic defect classification: - Scratches: 100 μm long, 0.1 μm wide, 50 Å; deep. - Pits: 20 μm diameter, 50 Å; deep - Stains: 20 μm diameter, 10 Å; thick [ Application ] - Opaque substrates - EPI Layers - Transparent film coatings (SiC, GaN, Sapphire)OEMモデルの説明
The Candela CS10 Optical Surface Analyzer is a compact device that offers exceptional sensitivity to particles and scratches on 2"-12" wafers using dual-laser Optical X-Beam technology. It simultaneously measures phase shift, scattered light, reflected light, and topography to detect and classify wafer surface defects. It is well-suited for laboratory and low volume production applications, and is easy to learn and operate.ドキュメント
ドキュメントなし