説明
説明なし構成
Single chamber tool PECVD. 8" In Fab still running.OEMモデルの説明
The Plasma-Therm 790 series is a self-contained Reactive Ion Etching (RIE) system that features a showerhead gas distribution system and a water-cooled RF platen. This system is capable of etching silicon, silicon dioxide, and silicon nitride. The chamber can achieve a base pressure in the range of 3x10-5 Torr and can operate within a pressure range of 10mTorr to 100mTorr. The system is controlled by a PC and offers both manual and automatic operation modes. It has four process gases available: CF4, CHF3, SF6, and O2.ドキュメント
ドキュメントなし
PLASMATHERM
790
検証済み
カテゴリ
Dry / Plasma Etch
最終検証： 23日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Installed / Running
製品ID：
105081
ウェーハサイズ：
8"/200mm
ヴィンテージ：
1993
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
PLASMATHERM
790
カテゴリ
Dry / Plasma Etch
最終検証： 23日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Installed / Running
製品ID：
105081
ウェーハサイズ：
8"/200mm
ヴィンテージ：
1993
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
Single chamber tool PECVD. 8" In Fab still running.OEMモデルの説明
The Plasma-Therm 790 series is a self-contained Reactive Ion Etching (RIE) system that features a showerhead gas distribution system and a water-cooled RF platen. This system is capable of etching silicon, silicon dioxide, and silicon nitride. The chamber can achieve a base pressure in the range of 3x10-5 Torr and can operate within a pressure range of 10mTorr to 100mTorr. The system is controlled by a PC and offers both manual and automatic operation modes. It has four process gases available: CF4, CHF3, SF6, and O2.ドキュメント
ドキュメントなし