説明
The unit is fully functional and has PAC to prevent cracking.構成
Refurbished by TEL in 2018 TEL Certified Used Tool Base unit ONO process. Quartz for Process & Loading Fixture Maintenance Fixture US Safety S2-93 ONO Process Specific Option -Integrated Gas System For ONO -2 NH3 Gas Line -1 DCS Gas Line -1 N2O Gas Line w/ PAC Unit -6 N2 Gas Line Thermal ALPHA-8SE Processing -Normal I/O Configuration -25 Wafers/Cassette without Notch Alignment -21 Cassette Loading Automation -8 inch Wafer Handling Capability -Wafer Load Automation -Wafer Counter -Auto Tube Shutter -Boat Elevator Cassette and Wafer Handling Automation -Power Supply Unit, Control Unit: 3-ph 480VAC, 1-ph 208VAC -Main Controller (WAVES) -Temperature Controller (Model 560) -VMN-40-101 500-1000C Cabinets/Units/Controllers -Furnace Cabinet (I Type Deep Bay Layout)OEMモデルの説明
The Alpha-8SE is a batch thermal processing system that covers multiple applications over a wide temperature range. It was introduced for 200mm wafer processing in the mid-1990s and has undergone continuous improvements to productivity, reliability, and stability. The Alpha-8SE supports 100/150/200mm wafer sizes and up to 150 wafer batch size for semiconductor thin film applications including oxidation & anneal, LPCVD of Si (Poly, a-Si), Si3N4, SiO2, and high-k ALD. It enables performance for today’s most advanced diffusion and deposition processes such as ALD (Atomic Layer Deposition), low-pressure radical oxidation, and low-temperature nitrides.ドキュメント
ドキュメントなし
TEL / TOKYO ELECTRON
ALPHA-8SE
検証済み
カテゴリ
Furnaces / Diffusion
最終検証： 16日前
主なアイテムの詳細
状態：
Refurbished
稼働ステータス:
不明
製品ID：
103893
ウェーハサイズ：
8"/200mm
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
TEL / TOKYO ELECTRON
ALPHA-8SE
カテゴリ
Furnaces / Diffusion
最終検証： 16日前
主なアイテムの詳細
状態：
Refurbished
稼働ステータス:
不明
製品ID：
103893
ウェーハサイズ：
8"/200mm
ヴィンテージ：
不明
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
The unit is fully functional and has PAC to prevent cracking.構成
Refurbished by TEL in 2018 TEL Certified Used Tool Base unit ONO process. Quartz for Process & Loading Fixture Maintenance Fixture US Safety S2-93 ONO Process Specific Option -Integrated Gas System For ONO -2 NH3 Gas Line -1 DCS Gas Line -1 N2O Gas Line w/ PAC Unit -6 N2 Gas Line Thermal ALPHA-8SE Processing -Normal I/O Configuration -25 Wafers/Cassette without Notch Alignment -21 Cassette Loading Automation -8 inch Wafer Handling Capability -Wafer Load Automation -Wafer Counter -Auto Tube Shutter -Boat Elevator Cassette and Wafer Handling Automation -Power Supply Unit, Control Unit: 3-ph 480VAC, 1-ph 208VAC -Main Controller (WAVES) -Temperature Controller (Model 560) -VMN-40-101 500-1000C Cabinets/Units/Controllers -Furnace Cabinet (I Type Deep Bay Layout)OEMモデルの説明
The Alpha-8SE is a batch thermal processing system that covers multiple applications over a wide temperature range. It was introduced for 200mm wafer processing in the mid-1990s and has undergone continuous improvements to productivity, reliability, and stability. The Alpha-8SE supports 100/150/200mm wafer sizes and up to 150 wafer batch size for semiconductor thin film applications including oxidation & anneal, LPCVD of Si (Poly, a-Si), Si3N4, SiO2, and high-k ALD. It enables performance for today’s most advanced diffusion and deposition processes such as ALD (Atomic Layer Deposition), low-pressure radical oxidation, and low-temperature nitrides.ドキュメント
ドキュメントなし